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Axcelis Technologies, Inc. (ACLS)

Nasdaq: ACLS · Special Industry Machinery, NEC · Beverly, MA · filing with the SEC since 2000
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Patents

US patents through Dec 31, 2025 · PatentsView, from the USPTO’s Open Data Portal · read Oct 27, 2026

404 patents granted to the 2 names below, as the owner printed on each patent when it was granted. A later sale, a lapse or an expiry is not read, so this is what was granted to Axcelis Technologies, Inc.’s names, not what it holds today.

Patents granted
404
404 utility, 1976 to Dec 31, 2025
Granted in 2025
5
Against 6 in 2024 and 10 in 2023
Applications published
293
38 of them in 2025
Names they are printed under
2
its own name
By yearGrantedApplications published
'11'12'13'14'15'16'17'18'19'20'21'22'23'24'25
Each pair is one calendar year. Applications are published about eighteen months after filing, so the newest years read low.
What they are aboutgrants since 2021
Electrical machinery, apparatus, energy26
Semiconductors6
The main technology area of each patent, in the World Intellectual Property Organization’s 35 fields.
Under which name2 counted
Axcelis Technologies, Inc. its own name
US, as the owner printed on each patent
404 granted
169 published
Axcelis Technologies, Inc. its own name
named as the applicant on its applications, in US
0 granted
124 published
Newest grantseach row opens the USPTO’s own copy
GrantedPatentTitleFieldOwner as printed
Dec 16, 202512,497,687Ion implantation system and method for implanting aluminum using non-fluorine-containing halide species or moleculesElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Nov 18, 202512,476,085Shielded gas inlet for an ion sourceElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Nov 4, 202512,463,003High temperature ion sourceElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Sep 30, 202512,431,332High energy implanter with small footprintElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Jul 8, 202512,354,834Method for setting gap between cathode and filamentElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Nov 26, 202412,154,763Hydraulic feed system for an ion sourceElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Oct 8, 202412,112,918Dual source injector with switchable analyzing magnetElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Jul 30, 202412,051,561Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beamElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Mar 5, 202411,923,169Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanismElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Feb 13, 202411,901,198Toxic outgas control post processSemiconductorsAxcelis Technologies, Inc.
Newest applications publishedan application is a clue, never a plan
PublishedApplicationTitleFieldOwner as printed
Dec 18, 20252025/0385118DUAL FORCE LIFT AND GROUND PINS FOR ELECTROSTATIC CHUCK AND METHOD FOR USE THEREOFSemiconductorsAxcelis Technologies, Inc.
Dec 11, 20252025/0379023GRANULAR SPUTTER SOURCE TARGET WITH REPELLER CUP AND METHOD FOR USE THEREOFElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Dec 4, 20252025/0372354SYSTEM AND METHOD FOR PLASMA TREATMENT WITH INDEPENDENT CONTROL OF NEUTRAL PARTICLE AND ION FLUXESElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Oct 30, 20252025/0336642ENERGY ACCURACY FOR AN RF LINEAR ACCELERATOR ION IMPLANTATION SYSTEMElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Oct 16, 20252025/0323007SEMICONDUCTOR RADIOACTIVE WAFER DECAY SAFETY AND OPERATION SYSTEMElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Oct 9, 20252025/0316481SUBSTRATE INCLUDING A PRE-EPITAXIAL STACKING FAULT EXPANSION-STOP LAYER, DEVICES INCLUDING THE SAME, AND PROCESS OF MANUFACTURESemiconductorsAxcelis Technologies, Inc.
Oct 2, 20252025/0308842SEMICONDUCTOR ELECTRICAL INSULATOR WITH REDUCED ARCINGElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Oct 2, 20252025/0308841DOPANT DELIVERY SYSTEM TO ION SOURCE USING INDUCTION HEATINGElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Sep 25, 20252025/0299907LINER WITH RAISED RIBS FOR PARTICLE TRANSPORT REDUCTIONElectrical machinery, apparatus, energyAxcelis Technologies, Inc.
Sep 25, 20252025/0297356METHOD AND APPARATUS FOR ION BEAM DIRECTIONAL DEPOSITIONSurface technology, coatingAxcelis Technologies, Inc.
What it applied for, 2024 to 2025: Electrical machinery, apparatus, energy 27 · Semiconductors 12 · Measurement 1 · Materials, metallurgy 1 · Surface technology, coating 1.

A patent is counted where the owner printed on it when it was granted carries the company’s own name, a former name, the name of a subsidiary its annual report lists, or its own name with a patent-holding phrase (Technology Licensing, Intellectual Property and the like), once the legal form, case and punctuation are set aside, and prints a country that name counts in. PatentsView’s data are published under the Creative Commons Attribution 4.0 licence. Source: PatentsView's granted patents and pre-grant publications, disambiguated, from the USPTO's Open Data Portal, through Dec 31, 2025, read Oct 27, 2026.

SI Assistanton ACLS · research, not advice