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Entegris, Inc. (ENTG)

Nasdaq: ENTG · Plastics Products, NEC · Billerica, MA · filing with the SEC since 1999
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Patents

US patents through Dec 31, 2025 · PatentsView, from the USPTO’s Open Data Portal · read Oct 27, 2026

891 patents granted to the 9 names below, as the owner printed on each patent when it was granted. A later sale, a lapse or an expiry is not read, so this is what was granted to Entegris, Inc.’s names, not what it holds today.

Patents granted
891
853 utility, 30 design, 8 reissue, 1976 to Dec 31, 2025
Granted in 2025
83
Against 72 in 2024 and 60 in 2023
Applications published
1,074
108 of them in 2025
Names they are printed under
9
its own name, a subsidiary
By yearGrantedApplications published
'11'12'13'14'15'16'17'18'19'20'21'22'23'24'25
Each pair is one calendar year. Applications are published about eighteen months after filing, so the newest years read low.
What they are aboutgrants since 2021
Semiconductors87
Chemical engineering49
Surface technology, coating42
Basic materials chemistry30
Organic fine chemistry16
Electrical machinery, apparatus, energy13
Environmental technology12
Mechanical elements12
Materials, metallurgy9
Handling8
Macromolecular chemistry, polymers6
Measurement6
The main technology area of each patent, in the World Intellectual Property Organization’s 35 fields.
Under which name9 counted
ENTEGRIS, INC. its own name
US, as the owner printed on each patent
788 granted
226 published
ENTEGRIS, INC. its own name
named as the applicant on its applications, in US
0 granted
760 published
International Test Solutions, LLC a subsidiary
US, as the owner printed on each patent
25 granted
17 published
CMC Materials, Inc. a subsidiary
named as the applicant on its applications, in US. 2 more under the same name are not counted (printed in JP)
0 granted
41 published
NexPlanar Corporation a subsidiary
US, as the owner printed on each patent
33 granted
7 published
CMC MATERIALS LLC a subsidiary
US, as the owner printed on each patent
33 granted
0 published
Poco Graphite, Inc. a subsidiary
US, as the owner printed on each patent
12 granted
9 published
International Test Solutions, Inc. a subsidiary
named as the applicant on its applications, in US
0 granted
12 published
NexPlanar Corporation a subsidiary
named as the applicant on its applications, in US
0 granted
2 published
Names not counted (1)
CMC Materials B.V.
No country is printed for it. 1 granted and 0 published under it are not counted.
Newest grantseach row opens the USPTO’s own copy
GrantedPatentTitleFieldOwner as printed
Dec 23, 202512,502,664Membranes for acid-sensitive solventsChemical engineeringENTEGRIS, INC.
Dec 16, 202512,500,109Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structuresSemiconductorsENTEGRIS, INC.
Dec 9, 202512,492,471Precursor delivery systems for determining material levelsSurface technology, coatingENTEGRIS, INC.
Dec 2, 202512,486,581Cleaning composition with molybdenum etching inhibitorSemiconductorsENTEGRIS, INC.
Dec 2, 202512,486,473Post CMP cleaning compositionBasic materials chemistryENTEGRIS, INC.
Nov 25, 202512,482,628Chlorine-containing precursors for ion implantation systems and related methodsElectrical machinery, apparatus, energyENTEGRIS, INC.
Nov 25, 202512,480,623Pressure regulatorMechanical elementsENTEGRIS, INC.
Nov 25, 202512,480,209Vaporization vessel and methodSurface technology, coatingENTEGRIS, INC.
Nov 25, 202512,479,028Metal-organic-framework-containing bodies and related methodsChemical engineeringENTEGRIS, INC.
Nov 18, 202512,474,236Multistage gas sampling trap and detection of sulfurous species contaminantMeasurementENTEGRIS, INC.
Newest applications publishedan application is a clue, never a plan
PublishedApplicationTitleFieldOwner as printed
Dec 25, 20252025/0388723SILYL ETHER-CONTAINING POLYMERS AND USES THEREOFMacromolecular chemistry, polymersENTEGRIS, INC.
Dec 18, 20252025/0383597RETICLE POD INNER POD HAVING DISSIMILAR MATERIAL AT CONTACT SURFACE INTERFACESSemiconductorsENTEGRIS, INC.
Dec 18, 20252025/0382701SYSTEMS FOR ON-SITE PURIFICATION AND RELATED METHODSSurface technology, coatingENTEGRIS, INC.
Dec 18, 20252025/0382319ONE STEP SYNTHESIS OF HIGH PURITY PRECURSORSOrganic fine chemistryENTEGRIS, INC.
Dec 11, 20252025/0377154AERODYNAMIC BLAST FREEZE CONTAINERSBasic materials chemistryENTEGRIS, INC.
Dec 11, 20252025/0376610SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF SILICON CARBIDEBasic materials chemistryENTEGRIS, INC.
Dec 11, 20252025/0376604SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF SILICON NITRIDE AND SILICON CARBIDEBasic materials chemistryENTEGRIS, INC.
Dec 11, 20252025/0376373METHODS AND EQUIPMENT FOR CRYOGENIC REMOVAL OF IMPURITIES FROM OXYGEN GASMaterials, metallurgyENTEGRIS, INC.
Dec 11, 20252025/0375743POROUS POLYETHYLENE FILTER MEMBRANE WITH ASYMMETRIC PORE STRUCTURE, AND RELATED FILTERS AND METHODSChemical engineeringENTEGRIS, INC.
Dec 11, 20252025/0375740MEMBRANES HAVING A CROSSLINKED BLOCK COPOLYMER AND PROCESSES FOR MAKING SAMEChemical engineeringENTEGRIS, INC.
What it applied for, 2024 to 2025: Semiconductors 45 · Chemical engineering 41 · Surface technology, coating 31 · Organic fine chemistry 29 · Basic materials chemistry 23 · Materials, metallurgy 13.

A patent is counted where the owner printed on it when it was granted carries the company’s own name, a former name, the name of a subsidiary its annual report lists, or its own name with a patent-holding phrase (Technology Licensing, Intellectual Property and the like), once the legal form, case and punctuation are set aside, and prints a country that name counts in. PatentsView’s data are published under the Creative Commons Attribution 4.0 licence. Source: PatentsView's granted patents and pre-grant publications, disambiguated, from the USPTO's Open Data Portal, through Dec 31, 2025, read Oct 27, 2026.

SI Assistanton ENTG · research, not advice