Company Analysis

MKS Inc. (MKSI)

Nasdaq: MKSI · Industrial Instruments For Measurement, Display, and Control · Andover, MA · filing with the SEC since 1997
Grade5.4
◀ Past 5.8● Present 5.2▶ Future 5.1

Patents

US patents through Dec 31, 2025 · PatentsView, from the USPTO’s Open Data Portal · read Oct 27, 2026

1,457 patents granted to the 26 names below, as the owner printed on each patent when it was granted. A later sale, a lapse or an expiry is not read, so this is what was granted to MKS Inc.’s names, not what it holds today.

Patents granted
1,457
1,445 utility, 7 reissue, 5 design, 1976 to Dec 31, 2025
Granted in 2025
28
Against 35 in 2024 and 25 in 2023
Applications published
1,184
37 of them in 2025
Names they are printed under
26
a former name, a subsidiary, its own name
By yearGrantedApplications published
'11'12'13'14'15'16'17'18'19'20'21'22'23'24'25
Each pair is one calendar year. Applications are published about eighteen months after filing, so the newest years read low.
What they are aboutgrants since 2021
Electrical machinery, apparatus, energy50
Surface technology, coating30
Measurement25
Optics10
Machine tools10
Semiconductors7
Control6
Audio-visual technology6
Chemical engineering6
Organic fine chemistry5
Mechanical elements3
Analysis of biological materials2
The main technology area of each patent, in the World Intellectual Property Organization’s 35 fields.
Under which name26 counted
MKS Instruments, Inc. a former name
US, as the owner printed on each patent
539 granted
263 published
Electro Scientific Industries, Inc. a subsidiary
US, as the owner printed on each patent
383 granted
263 published
Atotech Deutschland GmbH a subsidiary
DE, as the owner printed on each patent. 5 more under the same name are not counted (printed in US)
298 granted
151 published
NEWPORT CORPORATION a subsidiary
US, as the owner printed on each patent. 4 more under the same name are not counted (printed in JP, printed in CH, printed in GB)
151 granted
106 published
MKS Instruments, Inc. a former name
named as the applicant on its applications, in US
0 granted
152 published
Atotech Deutschland GmbH a subsidiary
named as the applicant on its applications, in DE
0 granted
134 published
ELECTRO SCIENTIFIC INDUSTRIES, INC. a subsidiary
named as the applicant on its applications, in US
0 granted
45 published
Atotech USA, Inc. a subsidiary
US, as the owner printed on each patent
21 granted
1 published
Photon Control Inc. a subsidiary
CA, as the owner printed on each patent. 2 more under the same name are not counted (printed in US)
5 granted
16 published
MKS Japan, Inc. a subsidiary
JP, as the owner printed on each patent
20 granted
0 published
MICRO-CONTROLE-SPECTRA-PHYSICS a subsidiary
FR, as the owner printed on each patent
8 granted
7 published
NEWPORT CORPORATION a subsidiary
named as the applicant on its applications, in US. 1 more under the same name are not counted (printed in AT)
0 granted
13 published
OPHIR OPTRONICS SOLUTIONS LTD. a subsidiary
IL, as the owner printed on each patent
6 granted
7 published
OPHIR OPTRONICS LTD. a subsidiary
IL, as the owner printed on each patent
7 granted
4 published
HIGH Q LASER GMBH a subsidiary
AT, as the owner printed on each patent
6 granted
4 published
V-Gen Ltd. a subsidiary
IL, as the owner printed on each patent
6 granted
4 published
MKS Inc. its own name
US, as the owner printed on each patent. 1 more under the same name are not counted (printed in CA)
5 granted
2 published
MICRO-CONTROLE - SPECTRA-PHYSICS a subsidiary
named as the applicant on its applications, in FR
0 granted
3 published
HIGH Q LASER GMBH a subsidiary
named as the applicant on its applications, in AT
0 granted
2 published
MKS Korea Ltd. a subsidiary
KR, as the owner printed on each patent
2 granted
0 published
V-GEN Ltd. a subsidiary
named as the applicant on its applications, in IL
0 granted
2 published
Electro Scientific Industries, Inc., an Oregon corporation a subsidiary
US, as the owner printed on each patent
0 granted
1 published
MKS Inc. its own name
named as the applicant on its applications, in US
0 granted
1 published
MKS Korea Ltd. a subsidiary
named as the applicant on its applications, in KR
0 granted
1 published
Ophir Optronics Solutions Ltd. a subsidiary
named as the applicant on its applications, in IL
0 granted
1 published
Photon Control Inc. a subsidiary
named as the applicant on its applications, in CA
0 granted
1 published
Names not counted (1)
Spectra-Physics, K.K.
Most of its patents print US; this name counts in JP. 310 granted and 1 published under it are not counted.
Newest grantseach row opens the USPTO’s own copy
Newest applications publishedan application is a clue, never a plan
PublishedApplicationTitleFieldOwner as printed
Dec 4, 20252025/0372408VALVE APPARATUSES AND RELATED METHODS FOR REACTIVE PROCESS GAS ISOLATION AND FACILITATING PURGE DURING ISOLATIONMechanical elementsMKS Inc.
Dec 4, 20252025/0369121METHOD FOR ETCHING A PLASTIC SUBSTRATE INCLUDING SPRAYING AND ELECTROLYTIC REGENERATIONSurface technology, coatingAtotech Deutschland GmbH
Nov 20, 20252025/0354286PROCESS FOR PRODUCING COPPER FOIL BY ELECTROLYTIC DEPOSITION OF COPPERSurface technology, coatingAtotech Deutschland GmbH
Nov 20, 20252025/0353108LASER PROCESSING APPARATUS INCLUDING LASER SENSOR SYSTEM AND METHODS OF MEASUREMENT OF BEAM CHARACTERISTICSMachine toolsElectro Scientific Industries, Inc.
Nov 20, 20252025/0353095GaN CLAMP WITH UNIFORM PRESSUREMachine toolsMKS Inc.
Nov 6, 20252025/0343388ACOUSTO-OPTIC SYSTEM HAVING PHASE-SHIFTING REFLECTOROpticsElectro Scientific Industries, Inc.
Nov 6, 20252025/0340994PROCESS FOR WET-CHEMICAL FORMATION OF A STABLE TIN OXIDE LAYER FOR PRINTED CIRCUIT BOARDSSurface technology, coatingAtotech Deutschland GmbH
Oct 30, 20252025/0333847COMPOSITION FOR DEPOSITING A PALLADIUM COATING ON A SUBSTRATESurface technology, coatingAtotech Deutschland GmbH
Oct 16, 20252025/0324516METHOD FOR CLEANING A NONCONDUCTIVE SURFACE AND USEAudio-visual technologyAtotech Deutschland GmbH
Oct 9, 20252025/0313958METHOD FOR NANO ETCHING OF COPPER AND COPPER ALLOY SURFACESAudio-visual technologyAtotech Deutschland GmbH
What it applied for, 2024 to 2025: Surface technology, coating 27 · Electrical machinery, apparatus, energy 18 · Measurement 14 · Machine tools 11 · Optics 7 · Audio-visual technology 4.

A patent is counted where the owner printed on it when it was granted carries the company’s own name, a former name, the name of a subsidiary its annual report lists, or its own name with a patent-holding phrase (Technology Licensing, Intellectual Property and the like), once the legal form, case and punctuation are set aside, and prints a country that name counts in. PatentsView’s data are published under the Creative Commons Attribution 4.0 licence. Source: PatentsView's granted patents and pre-grant publications, disambiguated, from the USPTO's Open Data Portal, through Dec 31, 2025, read Oct 27, 2026.

SI Assistanton MKSI · research, not advice