Patents
US patents through Dec 31, 2025 · PatentsView, from the USPTO’s Open Data Portal · read Oct 27, 2026
1,457 patents granted to the 26 names below, as the owner printed on each patent when it was granted. A later sale, a lapse or an expiry is not read, so this is what was granted to MKS Inc.’s names, not what it holds today.
Patents granted
1,457
1,445 utility, 7 reissue, 5 design, 1976 to Dec 31, 2025
Granted in 2025
28
Against 35 in 2024 and 25 in 2023
Applications published
1,184
37 of them in 2025
Names they are printed under
26
a former name, a subsidiary, its own name
By yearGrantedApplications published
'11'12'13'14'15'16'17'18'19'20'21'22'23'24'25
Each pair is one calendar year. Applications are published about eighteen months after filing, so the newest years read low.
What they are aboutgrants since 2021
Electrical machinery, apparatus, energy50
Surface technology, coating30
Measurement25
Optics10
Machine tools10
Semiconductors7
Control6
Audio-visual technology6
Chemical engineering6
Organic fine chemistry5
Mechanical elements3
Analysis of biological materials2
The main technology area of each patent, in the World Intellectual Property Organization’s 35 fields.
Under which name26 counted
MKS Instruments, Inc. a former name
US, as the owner printed on each patent
539 granted
263 publishedElectro Scientific Industries, Inc. a subsidiary
US, as the owner printed on each patent
383 granted
263 publishedAtotech Deutschland GmbH a subsidiary
DE, as the owner printed on each patent. 5 more under the same name are not counted (printed in US)
298 granted
151 publishedNEWPORT CORPORATION a subsidiary
US, as the owner printed on each patent. 4 more under the same name are not counted (printed in JP, printed in CH, printed in GB)
151 granted
106 publishedMKS Instruments, Inc. a former name
named as the applicant on its applications, in US
0 granted
152 publishedAtotech Deutschland GmbH a subsidiary
named as the applicant on its applications, in DE
0 granted
134 publishedELECTRO SCIENTIFIC INDUSTRIES, INC. a subsidiary
named as the applicant on its applications, in US
0 granted
45 publishedAtotech USA, Inc. a subsidiary
US, as the owner printed on each patent
21 granted
1 publishedPhoton Control Inc. a subsidiary
CA, as the owner printed on each patent. 2 more under the same name are not counted (printed in US)
5 granted
16 publishedMKS Japan, Inc. a subsidiary
JP, as the owner printed on each patent
20 granted
0 publishedMICRO-CONTROLE-SPECTRA-PHYSICS a subsidiary
FR, as the owner printed on each patent
8 granted
7 publishedNEWPORT CORPORATION a subsidiary
named as the applicant on its applications, in US. 1 more under the same name are not counted (printed in AT)
0 granted
13 publishedOPHIR OPTRONICS SOLUTIONS LTD. a subsidiary
IL, as the owner printed on each patent
6 granted
7 publishedOPHIR OPTRONICS LTD. a subsidiary
IL, as the owner printed on each patent
7 granted
4 publishedHIGH Q LASER GMBH a subsidiary
AT, as the owner printed on each patent
6 granted
4 publishedV-Gen Ltd. a subsidiary
IL, as the owner printed on each patent
6 granted
4 publishedMKS Inc. its own name
US, as the owner printed on each patent. 1 more under the same name are not counted (printed in CA)
5 granted
2 publishedMICRO-CONTROLE - SPECTRA-PHYSICS a subsidiary
named as the applicant on its applications, in FR
0 granted
3 publishedHIGH Q LASER GMBH a subsidiary
named as the applicant on its applications, in AT
0 granted
2 publishedMKS Korea Ltd. a subsidiary
KR, as the owner printed on each patent
2 granted
0 publishedV-GEN Ltd. a subsidiary
named as the applicant on its applications, in IL
0 granted
2 publishedElectro Scientific Industries, Inc., an Oregon corporation a subsidiary
US, as the owner printed on each patent
0 granted
1 publishedMKS Inc. its own name
named as the applicant on its applications, in US
0 granted
1 publishedMKS Korea Ltd. a subsidiary
named as the applicant on its applications, in KR
0 granted
1 publishedOphir Optronics Solutions Ltd. a subsidiary
named as the applicant on its applications, in IL
0 granted
1 publishedPhoton Control Inc. a subsidiary
named as the applicant on its applications, in CA
0 granted
1 published
Names not counted (1)
Spectra-Physics, K.K.
Most of its patents print US; this name counts in JP. 310 granted and 1 published under it are not counted.
Newest grantseach row opens the USPTO’s own copy
| Granted | Patent | Title | Field | Owner as printed |
|---|
| Dec 16, 2025 | 12,500,066 | Non-invasive IED estimation for pulsed-DC and low frequency applications | Electrical machinery, apparatus, energy | MKS Inc. |
| Nov 25, 2025 | 12,480,869 | Multi-wavelength ozone concentration sensor and method of use | Measurement | MKS Inc. |
| Oct 28, 2025 | 12,454,029 | Laser processing apparatus, methods of laser-processing workpieces and related arrangements | Machine tools | Electro Scientific Industries, Inc. |
| Oct 21, 2025 | 12,448,689 | Aqueous post treatment composition and method for corrosion protection | Surface technology, coating | Atotech Deutschland GmbH |
| Oct 7, 2025 | 12,439,528 | Method of preparing a high density interconnect printed circuit board including microvias filled with copper | Audio-visual technology | Atotech Deutschland GmbH |
| Oct 7, 2025 | 12,435,273 | Method for etching at least one surface of a plastic substrate | Surface technology, coating | Atotech Deutschland GmbH |
| Aug 26, 2025 | 12,397,362 | GaN clamp with uniform pressure | Machine tools | MKS Inc. |
| Aug 19, 2025 | 12,393,209 | Methods and apparatus for reporting inlet pressure in mass flow controllers | Measurement | MKS Inc. |
| Aug 5, 2025 | 12,381,369 | Acousto-optic system having phase-shifting reflector | Optics | Electro Scientific Industries, Inc. |
| Jul 29, 2025 | 12,371,811 | Apparatus for wet processing of a planar workpiece, device for a cell of the apparatus and method of operating the apparatus | Surface technology, coating | Atotech Deutschland GmbH |
Newest applications publishedan application is a clue, never a plan
| Published | Application | Title | Field | Owner as printed |
|---|
| Dec 4, 2025 | 2025/0372408 | VALVE APPARATUSES AND RELATED METHODS FOR REACTIVE PROCESS GAS ISOLATION AND FACILITATING PURGE DURING ISOLATION | Mechanical elements | MKS Inc. |
| Dec 4, 2025 | 2025/0369121 | METHOD FOR ETCHING A PLASTIC SUBSTRATE INCLUDING SPRAYING AND ELECTROLYTIC REGENERATION | Surface technology, coating | Atotech Deutschland GmbH |
| Nov 20, 2025 | 2025/0354286 | PROCESS FOR PRODUCING COPPER FOIL BY ELECTROLYTIC DEPOSITION OF COPPER | Surface technology, coating | Atotech Deutschland GmbH |
| Nov 20, 2025 | 2025/0353108 | LASER PROCESSING APPARATUS INCLUDING LASER SENSOR SYSTEM AND METHODS OF MEASUREMENT OF BEAM CHARACTERISTICS | Machine tools | Electro Scientific Industries, Inc. |
| Nov 20, 2025 | 2025/0353095 | GaN CLAMP WITH UNIFORM PRESSURE | Machine tools | MKS Inc. |
| Nov 6, 2025 | 2025/0343388 | ACOUSTO-OPTIC SYSTEM HAVING PHASE-SHIFTING REFLECTOR | Optics | Electro Scientific Industries, Inc. |
| Nov 6, 2025 | 2025/0340994 | PROCESS FOR WET-CHEMICAL FORMATION OF A STABLE TIN OXIDE LAYER FOR PRINTED CIRCUIT BOARDS | Surface technology, coating | Atotech Deutschland GmbH |
| Oct 30, 2025 | 2025/0333847 | COMPOSITION FOR DEPOSITING A PALLADIUM COATING ON A SUBSTRATE | Surface technology, coating | Atotech Deutschland GmbH |
| Oct 16, 2025 | 2025/0324516 | METHOD FOR CLEANING A NONCONDUCTIVE SURFACE AND USE | Audio-visual technology | Atotech Deutschland GmbH |
| Oct 9, 2025 | 2025/0313958 | METHOD FOR NANO ETCHING OF COPPER AND COPPER ALLOY SURFACES | Audio-visual technology | Atotech Deutschland GmbH |
What it applied for, 2024 to 2025: Surface technology, coating 27 · Electrical machinery, apparatus, energy 18 · Measurement 14 · Machine tools 11 · Optics 7 · Audio-visual technology 4.
A patent is counted where the owner printed on it when it was granted carries the company’s own name, a former name, the name of a subsidiary its annual report lists, or its own name with a patent-holding phrase (Technology Licensing, Intellectual Property and the like), once the legal form, case and punctuation are set aside, and prints a country that name counts in. PatentsView’s data are published under the Creative Commons Attribution 4.0 licence. Source: PatentsView's granted patents and pre-grant publications, disambiguated, from the USPTO's Open Data Portal, through Dec 31, 2025, read Oct 27, 2026.