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Onto Innovation Inc. (ONTO)

NYSE: ONTO · Measuring & Controlling Devices, NEC · Wilmington, MA · filing with the SEC since 1995
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Patents

US patents through Dec 31, 2025 · PatentsView, from the USPTO’s Open Data Portal · read Oct 27, 2026

331 patents granted to the 13 names below, as the owner printed on each patent when it was granted. A later sale, a lapse or an expiry is not read, so this is what was granted to Onto Innovation Inc.’s names, not what it holds today.

Patents granted
331
329 utility, 2 reissue, 1976 to Dec 31, 2025
Granted in 2025
10
Against 14 in 2024 and 6 in 2023
Applications published
235
22 of them in 2025
Names they are printed under
13
a former name, a subsidiary, its own name
By yearGrantedApplications published
'11'12'13'14'15'16'17'18'19'20'21'22'23'24'25
Each pair is one calendar year. Applications are published about eighteen months after filing, so the newest years read low.
What they are aboutgrants since 2021
Measurement29
Optics8
Semiconductors6
Computer technology3
Mechanical elements1
Thermal processes and apparatus1
Control1
The main technology area of each patent, in the World Intellectual Property Organization’s 35 fields.
Under which name13 counted
Nanometrics Incorporated a former name
US, as the owner printed on each patent. 11 more under the same name are not counted (printed in CA)
147 granted
37 published
Rudolph Technologies, Inc. a subsidiary
US, as the owner printed on each patent. 2 more under the same name are not counted (printed in BE)
114 granted
64 published
Onto Innovation Inc. its own name
US, as the owner printed on each patent
48 granted
26 published
Onto Innovation Inc. its own name
named as the applicant on its applications, in US
0 granted
57 published
Nanometrics Incorporated a former name
named as the applicant on its applications, in US
0 granted
23 published
4D TECHNOLOGY CORPORATION a subsidiary
US, as the owner printed on each patent
11 granted
5 published
Rudolph Technologies, Inc. a subsidiary
named as the applicant on its applications, in US
0 granted
12 published
Lumina Instruments Inc. a subsidiary
US, as the owner printed on each patent
10 granted
0 published
Lumina Instruments a subsidiary
named as the applicant on its applications, in US
0 granted
8 published
Inspectrology LLC a subsidiary
US, as the owner printed on each patent
1 granted
0 published
Inspectrology LLC a subsidiary
named as the applicant on its applications, in US
0 granted
1 published
LITEQ B.V. a subsidiary
named as the applicant on its applications, in NL
0 granted
1 published
NETA a subsidiary
named as the applicant on its applications, in FR
0 granted
1 published
Newest grantseach row opens the USPTO’s own copy
GrantedPatentTitleFieldOwner as printed
Nov 18, 202512,474,643System and method for performing alignment and overlay measurement through an opaque layerOpticsOnto Innovation Inc.
Oct 14, 202512,443,153Deep learning model in high-mix semiconductor manufacturingControlOnto Innovation Inc.
Oct 14, 202512,442,717Interferometer with auxiliary lens for measurement of a transparent test objectMeasurementOnto Innovation Inc.
Aug 12, 202512,386,271Multi-layer calibration for empirical overlay measurementOpticsOnto Innovation Inc.
Jul 8, 202512,354,254Low contrast non-referential defect detectionComputer technologyOnto Innovation Inc.
Jun 24, 202512,339,235Simultaneous back and/or front and/or bulk defect detectionMeasurementOnto Innovation Inc.
Mar 25, 202512,259,338Mitigation of undesired spectral effects in optical metrologyMeasurementOnto Innovation Inc.
Feb 25, 202512,237,198Area camera substrate pre-alignerSemiconductorsOnto Innovation Inc.
Feb 25, 202512,235,091Apparatus to characterize substrates and filmsMeasurementOnto Innovation Inc.
Feb 4, 202512,216,051Dynamic phase-shift interferometer utilizing a synchronous optical frequency-shiftMeasurementOnto Innovation Inc.
Newest applications publishedan application is a clue, never a plan
PublishedApplicationTitleFieldOwner as printed
Dec 18, 20252025/0385139INSPECTION METHOD AND SYSTEM FOR INTEGRATED CIRCUIT SUBSTRATESSemiconductorsOnto Innovation Inc.
Nov 20, 20252025/0355368METROLOGY TO REDUCE OVERLAY ERROROpticsOnto Innovation Inc.
Oct 30, 20252025/0336053AUTOMATED SUBSTRATE DEFECT IDENTIFICATION USING MULTIPLE CLASSIFICATION ENGINE MODELSComputer technologyOnto Innovation Inc.
Oct 23, 20252025/0327924ON-THE-FLY OPTO-ACOUSTIC MICROSCOPYMeasurementOnto Innovation Inc.
Oct 23, 20252025/0327758METROLOGY BASED ON TIME RESOLVED NON-ACOUSTIC SIGNALSMeasurementOnto Innovation Inc.
Oct 23, 20252025/0327737OPTO-ACOUSTIC MICROSCOPY USING AN INSTANTANEOUS SIGNAL DIFFERENCE BETWEEN SIGNALS FROM TWO DISCRETE DELAY TIMES ACQUIRED WITH A SINGLE PROBE BEAMMeasurementOnto Innovation Inc.
Oct 9, 20252025/0314974FRONT-TO-BACK OVERLAY (FTBO) STANDARDOpticsOnto Innovation Inc.
Sep 18, 20252025/0290871SURFACE INSPECTION SYSTEMMeasurementOnto Innovation Inc.
Sep 11, 20252025/0283811VARIABLE WAVELENGTH INTERFEROMETRYAudio-visual technologyOnto Innovation Inc.
Sep 4, 20252025/0279710TWO-AXIS-MOTION FROM A LINEAR ACTUATORElectrical machinery, apparatus, energyOnto Innovation Inc.
What it applied for, 2024 to 2025: Measurement 17 · Optics 11 · Computer technology 9 · Semiconductors 3 · Control 2 · Electrical machinery, apparatus, energy 1.

A patent is counted where the owner printed on it when it was granted carries the company’s own name, a former name, the name of a subsidiary its annual report lists, or its own name with a patent-holding phrase (Technology Licensing, Intellectual Property and the like), once the legal form, case and punctuation are set aside, and prints a country that name counts in. PatentsView’s data are published under the Creative Commons Attribution 4.0 licence. Source: PatentsView's granted patents and pre-grant publications, disambiguated, from the USPTO's Open Data Portal, through Dec 31, 2025, read Oct 27, 2026.

SI Assistanton ONTO · research, not advice